MAS6512 is a capacitive sensor signal conditioner IC, capable to interface both single and differential capacitance sensors. It uses a 16-bit Capacitance-to-Digital Converter, which employs a delta-sigma (ΔΣ) conversion technique. The output can be proportional either to capacitance difference or to capacitance ratio. The IC is designed especially to meet the requirement for low power consumption, thus making it an ideal choice for battery powered systems.

In addition to capacitance measurement the device has an internal temperature sensor for temperature measurement and temperature compensation purposes. The 256-bit EEPROM memory stores trimming and calibration coefficients on chip.

VTI sensor

Example of MEMS capacitive pressure sensors from Murata (VTI Technologies Oy) 1.40 mm x 1.40 mm, height 0.85 mm.

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